請參考多晶矽退火食譜其中項目8及9 ,我們想知道多晶矽上方的氧化物厚度

請參考多晶矽退火食譜其中項目8及9 ,我們想知道多晶矽上方的氧化物厚度是多少?

結果 (英文) 1:

Please refer to items 8 and 9 of the polysilicon annealing recipe. We want to know what is the thickness of the oxide on the polysilicon?

結果 (英文) 2:

We would like to know what is the thickness of the oxides above polycrystalline amorphous food 譜 of which items 8 and 9 are.

結果 (英文) 3:

Please refer to polycrystalline silicon annealing recipe, items 8 and 9. We want to know the oxide thickness above the polycrystalline silicon?